CMS300 (In-Plane) MEMS Combi-Sensor

High-Precision Gyroscope and Accelerometer

Silicon Sensing CMS300 (In-Plane) MEMS Combi-Sensor integrates a high-precision gyroscope and accelerometer into a compact package. With low noise and low drift characteristics, it provides accurate and reliable motion sensing for a wide range of applications, including aerospace, industrial automation, and robotics. CMS300's robust design ensures consistent performance in demanding environments, making it a trusted choice for precise inertial measurements.

Supply Voltage	3.3V
Angular Random Walk	0.40º/√hr
Bias Instability	10°/hr
Bandwidth (nominal)	45, 55, 90 or 110Hz Acc; 45, 62, 95 or 190Hz (user selectable)
Operating Temperature	-40°C to +125°C
Typ. Current Consumption	8mA
Angular Rate Range	±150°/s to ±300°/s
Axes of Acceleration	2
Acceleration Range	±2.5 to ±10g
Velocity Random Walk	<0.05 m/s/√hr
Rate SF over Temp	±2.0%
Rate Bias Over Temperature	±1.0˚/s typ ±1.75˚/s max
Acc Bias over Temp	±30mg to ±75mg
Acc SF over Temp	±2.5%
Baud Rate	SPI msg rate max 10kHz clock rate 7MHz
Accelerometer Bias Instability	<0.05mg
Vibration Rectification Error	0.001°/s/g2 rms to 0.003°/s/g2 rms

Small (10.4 x 6.0 x 2.2mm)

Proven and robust silicon MEMS vibrating ring gyro and dual-axis accelerometer

Excellent bias over temperature (1.75°/s, 30mg)

Flat and orthogonal mounting options (CMS300 and CMS390)

User selectable dynamic ranges

Digital (SPI®) output mode

User selectable bandwidth

Range and bandwidth independently selectable for each axis

Low power consumption (8mA) from 3.3V supply

High shock and vibration rejection

Temperature range -40 +125°C

Hermetically sealed ceramic LCC surface mount package for temperature and humidity resistance

Integral temperature sensor

RoHS compliant