CMS390 (Orthogonal) MEMS Combi-Sensor

High-Precision Gyroscope and Accelerometer

Silicon Sensing CMS390 (Orthogonal) MEMS Combi-Sensor combines a 3-axis gyroscope and accelerometer for precise inertial measurements. Featuring high stability and low drift, CMS390 is designed for applications requiring accurate motion sensing, such as aerospace, industrial automation, and robotics. Its compact and rugged design ensures reliable performance in harsh environments, making it an ideal choice for demanding applications where precision and durability are critical.

Supply Voltage	3.3V
Angular Random Walk	0.40º/√hr
Bias Instability	10°/hr
Bandwidth (nominal)	45, 55, 90 or 110Hz Acc; 45, 62, 95 or 190Hz (user selectable)
Operating Temperature	-40°C to +125°C
Current Consumption	8mA
Velocity Random Walk	<0.05 m/s/√h
Noise Spectral Density Gyro	0.1 °/s rms
Noise Spectral Density Acc	1mg rms
Vibration Rectification (ACC)	0.001°/s/g2 rms to 0.003°/s/g2 rms
Rate SF over Temp	±2.0%
Rate Bias Over Temperature	±1.0˚/s typ ±1.75˚/s max
Acc Bias over Temp	±30mg to ±75mg
Acc SF over Temp	±2.5%
Baud Rate	SPI msg rate max 10kHz clock rate 7MHz
Accelerometer Bias Instability	<0.05mg
Vibration Rectification Error	0.001°/s/g2 rms to 0.003°/s/g2 rms

Small (10.4 x 6.7 x 2.7mm)

Proven and robust silicon MEMS vibrating ring gyro and dual-axis accelerometer

Excellent bias over temperature (1.75˚/s, 30mg)

Flat and orthogonal mounting options (CMS300 and CMS390)

User selectable dynamic ranges (150˚/s, 300˚/s, 2.5g and 10g)

Digital (SPI®) output mode

User selectable bandwidth (Rate; 45, 55, 90 or 110Hz Acc; 45, 62, 95 or 190Hz)

Range and bandwidth independently selectable for each axis

Low power consumption (8mA) from 3.3V supply

High shock and vibration rejection

Temperature range -40 +125˚C

Hermetically sealed ceramic LCC surface mount package for temperature and humidity resistance

Integral temperature sensor

RoHS compliant